Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10455680 | Method and apparatus for purifying target material for EUV light source | Georgiy O. Vaschenko, Peter Michael Baumgart, Chirag Rajyaguru, Benjamin Andrew Sams, Armin Bernhard Ridinger | 2019-10-22 |