Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481498 | Droplet generator for lithographic apparatus, EUV source and lithographic apparatus | Johan Frederik Dijksman, Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Koen Gerhardus Winkels, Theodorus Wilhelmus Driessen, Georgiy O. Vaschenko +4 more | 2019-11-19 |
| 10455680 | Method and apparatus for purifying target material for EUV light source | Georgiy O. Vaschenko, Chirag Rajyaguru, Benjamin Andrew Sams, Armin Bernhard Ridinger, Janine Kardokus | 2019-10-22 |
| 10426020 | Droplet generator steering system | John M. Algots, Abhiram Govindaraju, Chirag Rajyaguru | 2019-09-24 |