Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10499485 | Supply system for an extreme ultraviolet light source | Koen Gerhardus Winkels, Georgiy O. Vaschenko, Theodorus Wilhelmus Driessen, Johan Frederik Dijksman, Wilhelmus Henricus Theodorus Maria Aangenent | 2019-12-03 |
| 10481498 | Droplet generator for lithographic apparatus, EUV source and lithographic apparatus | Johan Frederik Dijksman, Koen Gerhardus Winkels, Theodorus Wilhelmus Driessen, Georgiy O. Vaschenko, Peter Michael Baumgart +4 more | 2019-11-19 |