Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10499485 | Supply system for an extreme ultraviolet light source | Koen Gerhardus Winkels, Georgiy O. Vaschenko, Theodorus Wilhelmus Driessen, Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Wilhelmus Henricus Theodorus Maria Aangenent | 2019-12-03 |
| 10481498 | Droplet generator for lithographic apparatus, EUV source and lithographic apparatus | Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Koen Gerhardus Winkels, Theodorus Wilhelmus Driessen, Georgiy O. Vaschenko, Peter Michael Baumgart +4 more | 2019-11-19 |
| 10222693 | Imprint lithography alignment method and apparatus | Anke Pierik, Sander Frederik Wuister, Roelof Koole | 2019-03-05 |