Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10499485 | Supply system for an extreme ultraviolet light source | Koen Gerhardus Winkels, Georgiy O. Vaschenko, Theodorus Wilhelmus Driessen, Johan Frederik Dijksman, Bastiaan Lambertus Wilhelmus Marinus Van De Ven | 2019-12-03 |
| 10481498 | Droplet generator for lithographic apparatus, EUV source and lithographic apparatus | Johan Frederik Dijksman, Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Koen Gerhardus Winkels, Theodorus Wilhelmus Driessen, Georgiy O. Vaschenko +4 more | 2019-11-19 |
| 10401743 | Control system, positioning system, lithographic apparatus and device manufacturing method | Jeroen Johannes Theodorus Hendrikus De Best, Stan Henricus Van Der Meulen | 2019-09-03 |