Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10401743 | Control system, positioning system, lithographic apparatus and device manufacturing method | Jeroen Johannes Theodorus Hendrikus De Best, Wilhelmus Henricus Theodorus Maria Aangenent | 2019-09-03 |