Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10008367 | Gas diffuser unit, process chamber and wafer processing method | Chien-Kuo Huang, Joung-Wei Liou, Chia-I Shen, Fei-Fan Chen | 2018-06-26 |
| 9978637 | Mechanism for forming patterned metal pad connected to multiple through silicon vias (TSVs) | Tzuan-Horng Liu, Chung-Yu Lu, Hsien-Pin Hu, Shang-Yun Hou, Shin-Puu Jeng | 2018-05-22 |
| 9881918 | Forming doped regions in semiconductor strips | Chia-Hui Lin, Shin-Yeu Tsai, Kai Hung Cheng | 2018-01-30 |