Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10011532 | Remote plasma system and method | Fei-Fan Chen, Wen-Sheng Wu | 2018-07-03 |
| 10008367 | Gas diffuser unit, process chamber and wafer processing method | Shih-Wen Huang, Joung-Wei Liou, Chia-I Shen, Fei-Fan Chen | 2018-06-26 |