Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10008367 | Gas diffuser unit, process chamber and wafer processing method | Chien-Kuo Huang, Shih-Wen Huang, Joung-Wei Liou, Fei-Fan Chen | 2018-06-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10008367 | Gas diffuser unit, process chamber and wafer processing method | Chien-Kuo Huang, Shih-Wen Huang, Joung-Wei Liou, Fei-Fan Chen | 2018-06-26 |