Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10156794 | Positioning device for aligning semiconductor tool and overhead hoist transport system | Sheng-Kang Yu, Yu-Fu Lin | 2018-12-18 |
| 10067418 | Particle removal system and method thereof | Shu-Hao Chang, Chi-Lun Lu, Shang-Chieh Chien, Ming-Chin Chien, Jui-Ching Wu +2 more | 2018-09-04 |
| 9964850 | Method to mitigate defect printability for ID pattern | Yen-Cheng Lu, Chia-Hao Hsu, Shinn-Sheng Yu, Jeng-Horng Chen, Anthony Yen | 2018-05-08 |
| 9869934 | Collector in an extreme ultraviolet lithography system with optimal air curtain protection | Chia-Ching Huang, Tsung-Yu Chen, Chia-Hao Hsu, Shinn-Sheng Yu | 2018-01-16 |