Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10120278 | Carboxylic acid onium salt, chemically amplified resist composition, and pattern forming process | Kazuhiro Katayama | 2018-11-06 |
| 10114287 | Silicone skeleton-containing polymer compound and method for producing same, chemically amplified negative resist composition, photo-curable dry film and method for producing same, patterning process, layered product, and substrate | Hiroyuki Urano, Masashi Iio, Katsuya Takemura, Koji Hasegawa, Takayuki Fujiwara | 2018-10-30 |
| 10023674 | Monomer, polymer, resist composition, and patterning process | Masayoshi Sagehashi, Koji Hasegawa, Teppei Adachi, Kazuhiro Katayama, Jun Hatakeyama | 2018-07-17 |
| 10007178 | Positive resist composition and patterning process | Jun Hatakeyama, Masaki Ohashi | 2018-06-26 |
| 9989847 | Onium salt compound, resist composition, and pattern forming process | Masaki Ohashi, Jun Hatakeyama | 2018-06-05 |
| 9897916 | Compound, polymer compound, resist composition, and patterning process | Masaki Ohashi, Jun Hatakeyama, Takayuki Fujiwara | 2018-02-20 |