Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10120278 | Carboxylic acid onium salt, chemically amplified resist composition, and pattern forming process | Masahiro Fukushima | 2018-11-06 |
| 10023674 | Monomer, polymer, resist composition, and patterning process | Masayoshi Sagehashi, Masahiro Fukushima, Koji Hasegawa, Teppei Adachi, Jun Hatakeyama | 2018-07-17 |
| 9927708 | Pattern forming process and shrink agent | Jun Hatakeyama, Masayoshi Sagehashi | 2018-03-27 |