Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10114287 | Silicone skeleton-containing polymer compound and method for producing same, chemically amplified negative resist composition, photo-curable dry film and method for producing same, patterning process, layered product, and substrate | Hiroyuki Urano, Katsuya Takemura, Koji Hasegawa, Masahiro Fukushima, Takayuki Fujiwara | 2018-10-30 |
| 10087288 | Silicone skeleton-containing polymer compound, chemically amplified negative resist composition, photo-curable dry film and method for producing same, patterning process, layered product, substrate, and semiconductor apparatus | Hiroyuki Urano, Katsuya Takemura, Takashi Miyazaki | 2018-10-02 |