Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10087288 | Silicone skeleton-containing polymer compound, chemically amplified negative resist composition, photo-curable dry film and method for producing same, patterning process, layered product, substrate, and semiconductor apparatus | Hiroyuki Urano, Masashi Iio, Katsuya Takemura | 2018-10-02 |
| 9897490 | Temperature measurement device, integrated circuit, and temperature measurement method | Hiroyuki Hamano | 2018-02-20 |