Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10083829 | Apparatus for treating substrates using supercritical fluids, substrate treatment system including the same and method of treating substrates using the same | Ji Hoon Jeong, Jung-Min Oh, Hyo-San Lee | 2018-09-25 |
| 10029332 | Spot heater and device for cleaning wafer using the same | Young-Hoo Kim, Il-Sang Lee, Yong-Sun Ko, Chang-Gil Ryu, Hyo-San Lee | 2018-07-24 |
| 9903651 | Sealing member and substrate processing apparatus including the same | Yong-Myung Jun, Yong-Sun Ko, Il-Sang Lee, Ji Hoon Jeong, Yong-Jhin Cho +1 more | 2018-02-27 |