Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9941110 | Manufacturing method and fluid supply system for treating substrate | Jung-Min Oh, Hyosan Lee, Yongsun Ko, Kyoungseob Kim, Seokhoon Kim +2 more | 2018-04-10 |
| 9934959 | Method and apparatus for purifying cleaning agent | Jung-Min Oh, Yongmyung Jun, Yongsun Ko, Kuntack Lee, Hyosan Lee | 2018-04-03 |
| 9903651 | Sealing member and substrate processing apparatus including the same | Yong-Myung Jun, Yong-Sun Ko, Kun-Tack Lee, Il-Sang Lee, Ji Hoon Jeong +1 more | 2018-02-27 |