Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9903651 | Sealing member and substrate processing apparatus including the same | Yong-Sun Ko, Kun-Tack Lee, Il-Sang Lee, Ji Hoon Jeong, Yong-Jhin Cho +1 more | 2018-02-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9903651 | Sealing member and substrate processing apparatus including the same | Yong-Sun Ko, Kun-Tack Lee, Il-Sang Lee, Ji Hoon Jeong, Yong-Jhin Cho +1 more | 2018-02-27 |