Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10029332 | Spot heater and device for cleaning wafer using the same | Young-Hoo Kim, Yong-Sun Ko, Chang-Gil Ryu, Kun-Tack Lee, Hyo-San Lee | 2018-07-24 |
| 9903651 | Sealing member and substrate processing apparatus including the same | Yong-Myung Jun, Yong-Sun Ko, Kun-Tack Lee, Ji Hoon Jeong, Yong-Jhin Cho +1 more | 2018-02-27 |