Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10029332 | Spot heater and device for cleaning wafer using the same | Il-Sang Lee, Yong-Sun Ko, Chang-Gil Ryu, Kun-Tack Lee, Hyo-San Lee | 2018-07-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10029332 | Spot heater and device for cleaning wafer using the same | Il-Sang Lee, Yong-Sun Ko, Chang-Gil Ryu, Kun-Tack Lee, Hyo-San Lee | 2018-07-24 |