Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10029332 | Spot heater and device for cleaning wafer using the same | Young-Hoo Kim, Il-Sang Lee, Yong-Sun Ko, Kun-Tack Lee, Hyo-San Lee | 2018-07-24 |
| 9999957 | Polishing head and polishing carrier apparatus having the same | Yun-Seok Choi, Geun-Young Song, Ki-Yeon Chu, Jin-Suk Hong | 2018-06-19 |