Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9999957 | Polishing head and polishing carrier apparatus having the same | Yun-Seok Choi, Chang-Gil Ryu, Geun-Young Song, Ki-Yeon Chu | 2018-06-19 |
| 9903651 | Sealing member and substrate processing apparatus including the same | Yong-Myung Jun, Yong-Sun Ko, Kun-Tack Lee, Il-Sang Lee, Ji Hoon Jeong +1 more | 2018-02-27 |