Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10083829 | Apparatus for treating substrates using supercritical fluids, substrate treatment system including the same and method of treating substrates using the same | Ji Hoon Jeong, Kun-Tack Lee, Hyo-San Lee | 2018-09-25 |
| 10025192 | Methods of manufacturing semiconductor devices using a composition for removing photoresist and methods of removing photoresist from a semiconductor substrate | Mi Hyun Park, Hyo-San Lee, Ji Hoon Jeong, Yong-Sun Ko, In-Gi Kim +4 more | 2018-07-17 |
| 9941110 | Manufacturing method and fluid supply system for treating substrate | Hyosan Lee, Yongsun Ko, Kyoungseob Kim, Seokhoon Kim, Kuntack Lee +2 more | 2018-04-10 |
| 9934959 | Method and apparatus for purifying cleaning agent | Yong-Jhin Cho, Yongmyung Jun, Yongsun Ko, Kuntack Lee, Hyosan Lee | 2018-04-03 |