Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10155903 | Metal etchant compositions and methods of fabricating a semiconductor device using the same | Hyosan Lee, Kyoungseob Kim, Kuntack Lee, Jihoon Jeong, Chen Lin +1 more | 2018-12-18 |
| 10128120 | Method of treating a layer | Kwangsu Kim, Byoung Jae Park, Kyunghyun Kim, ChangSup Mun, Kijong Park | 2018-11-13 |
| 10096453 | Method and apparatus for plasma etching | Kijong Park, Jun-Youl Yang, Kyunghyun Kim, Taeheon Kim, Jae-Jin Shin | 2018-10-09 |
| 10084051 | Semiconductor devices including field effect transistors and methods of fabricating the same | Sangjine Park, Jae Hwan LEE | 2018-09-25 |
| 9941110 | Manufacturing method and fluid supply system for treating substrate | Jung-Min Oh, Hyosan Lee, Kyoungseob Kim, Seokhoon Kim, Kuntack Lee +2 more | 2018-04-10 |
| 9934959 | Method and apparatus for purifying cleaning agent | Yong-Jhin Cho, Jung-Min Oh, Yongmyung Jun, Kuntack Lee, Hyosan Lee | 2018-04-03 |
| 9859432 | Semiconductor devices having spacer protection pattern | Sangjine Park, Hagju Cho, Byungjae PARK, Jeongnam Han | 2018-01-02 |