Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096453 | Method and apparatus for plasma etching | Kijong Park, Yongsun Ko, Kyunghyun Kim, Taeheon Kim, Jae-Jin Shin | 2018-10-09 |
| 9972638 | Methods of fabricating three-dimensional semiconductor devices | Sunghae Lee, Daehong Eom, JinGyun Kim, Daehyun Jang, Kihyun Hwang +4 more | 2018-05-15 |