Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10088760 | Exposure apparatus, exposure method, method for producing device, and optical part | Hiroyuki Nagasaka, Hiroaki Takaiwa, Ryuichi Hoshika, Hitoshi Ishizawa | 2018-10-02 |
| 10082739 | Exposure method, exposure apparatus, and method for producing device | — | 2018-09-25 |
| 10048602 | Exposure apparatus, exposure method, and method for producing device | Naoyuki Kobayashi, Soichi Owa, Yasuhiro Omura | 2018-08-14 |
| 9885959 | Illumination optical apparatus having deflecting member, lens, polarization member to set polarization in circumference direction, and optical integrator | Takehito Kudo | 2018-02-06 |