Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10156792 | Projection optical system, exposure apparatus, and exposure method | — | 2018-12-18 |
| 10048602 | Exposure apparatus, exposure method, and method for producing device | Naoyuki Kobayashi, Soichi Owa, Shigeru Hirukawa | 2018-08-14 |
| 9933705 | Reduction projection optical system, exposure apparatus, and exposure method | — | 2018-04-03 |
| 9891539 | Projection optical system, exposure apparatus, and exposure method | Takaya Okada, Hiroyuki Nagasaka | 2018-02-13 |