Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10048602 | Exposure apparatus, exposure method, and method for producing device | Soichi Owa, Shigeru Hirukawa, Yasuhiro Omura | 2018-08-14 |
| 9939739 | Exposure apparatus and method for producing device | Akikazu Tanimoto | 2018-04-10 |