Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10054858 | Spatial light modulator, method of driving same, and exposure method and apparatus | Yoji Watanabe, Tomoharu Fujiwara | 2018-08-21 |
| 10048602 | Exposure apparatus, exposure method, and method for producing device | Naoyuki Kobayashi, Shigeru Hirukawa, Yasuhiro Omura | 2018-08-14 |
| 10012768 | Optical material, optical element, and method for manufacturing same | Shunji Watanabe, Junji Suzuki, Kazuhiro Kido, Hidemitsu Toba | 2018-07-03 |
| 9946162 | Controller for optical device, exposure method and apparatus, and method for manufacturing device | — | 2018-04-17 |