Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10054858 | Spatial light modulator, method of driving same, and exposure method and apparatus | Yoji Watanabe, Soichi Owa | 2018-08-21 |
| 9941217 | Mark, method for forming same, and exposure apparatus | Yuji Shiba, Nobutaka Magome | 2018-04-10 |
| 9911701 | Mark forming method and device manufacturing method | — | 2018-03-06 |