Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10012768 | Optical material, optical element, and method for manufacturing same | Soichi Owa, Shunji Watanabe, Kazuhiro Kido, Hidemitsu Toba | 2018-07-03 |
| 9927712 | Spatial light modulation element module, photolithographing apparatus, exposure apparatus, method of manufacturing spatial light modulation element module and method of manufacturing device | Yoshihiko Suzuki | 2018-03-27 |
| 9910268 | Spatial light modulator, photolithographing apparatus, exposure apparatus, and method of manufacturing device | Yoshihiko Suzuki | 2018-03-06 |