Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9927712 | Spatial light modulation element module, photolithographing apparatus, exposure apparatus, method of manufacturing spatial light modulation element module and method of manufacturing device | Junji Suzuki | 2018-03-27 |
| 9910268 | Spatial light modulator, photolithographing apparatus, exposure apparatus, and method of manufacturing device | Junji Suzuki | 2018-03-06 |
| 9875413 | Vehicle monitoring apparatus and vehicle monitoring method | Yasuhiro Aoki, Toshio Sato, Kentaro Yokoi, Kenji Kimiyama, Junichi Nakamura +1 more | 2018-01-23 |