Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10088760 | Exposure apparatus, exposure method, method for producing device, and optical part | Hiroaki Takaiwa, Shigeru Hirukawa, Ryuichi Hoshika, Hitoshi Ishizawa | 2018-10-02 |
| 9977336 | Exposure method, exposure apparatus, and method for producing device | — | 2018-05-22 |
| 9977352 | Exposure apparatus and device manufacturing method | Takeshi Okuyama | 2018-05-22 |
| 9933708 | Exposure method, exposure apparatus, and method for producing device | — | 2018-04-03 |
| 9910369 | Exposure apparatus, exposure method, and device producing method | — | 2018-03-06 |
| 9891539 | Projection optical system, exposure apparatus, and exposure method | Yasuhiro Omura, Takaya Okada | 2018-02-13 |