Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10151983 | Exposure apparatus and device manufacturing method | Takashi Horiuchi | 2018-12-11 |
| 10088760 | Exposure apparatus, exposure method, method for producing device, and optical part | Hiroyuki Nagasaka, Shigeru Hirukawa, Ryuichi Hoshika, Hitoshi Ishizawa | 2018-10-02 |
| 10012909 | Liquid recovery apparatus, exposure apparatus, exposure method, and device manufacturing method | Hideaki Hara, Dai Arai | 2018-07-03 |