Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10126661 | Exposure apparatus and device fabrication method | — | 2018-11-13 |
| 10081108 | Carrier system, exposure apparatus, carrier method, exposure method, device manufacturing method, and suction device | — | 2018-09-25 |
| 10012909 | Liquid recovery apparatus, exposure apparatus, exposure method, and device manufacturing method | Hiroaki Takaiwa, Dai Arai | 2018-07-03 |
| 10004720 | Agent for preventing and/or treating ophthalmologic diseases | Masamitsu Shimazawa, Tomomi Masuda | 2018-06-26 |