Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10088760 | Exposure apparatus, exposure method, method for producing device, and optical part | Hiroyuki Nagasaka, Hiroaki Takaiwa, Shigeru Hirukawa, Ryuichi Hoshika | 2018-10-02 |
| 9915761 | Optical system having optical thin film including amorphous silicon oxide-based binder | Shunsuke Niisaka, Tsuyoshi Murata | 2018-03-13 |