Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10106568 | Hafnium-containing film forming compositions for vapor deposition of hafnium-containing films | Jean-Marc Girard, Hana Ishii, Clément Lansalot-Matras, Julien Lieffrig | 2018-10-23 |
| 10103031 | Chemistries for TSV/MEMS/power device etching | Peng Shen, Curtis Anderson, Rahul Gupta, Vincent M. Omarjee, Nathan Stafford | 2018-10-16 |
| 10094021 | Group 6 transition metal-containing compounds for vapor deposition of group 6 transition metal-containing films | Clément Lansalot-Matras, Julien Lieffrig, Antoine COLAS, Jong Min Kim | 2018-10-09 |
| 9938303 | Organosilane precursors for ALD/CVD silicon-containing film applications | Glenn Kuchenbeiser, Venkateswara R. Pallem | 2018-04-10 |
| 9911590 | Methods of forming dielectric films, new precursors and their use in semiconductor manufacturing | Nicolas Blasco, Audrey Pinchart, Christophe Lachaud | 2018-03-06 |
| 9892932 | Chemistries for TSV/MEMS/power device etching | Peng Shen, Curtis Anderson, Rahul Gupta, Vincent M. Omarjee, Nathan Stafford | 2018-02-13 |
| 9868753 | Germanium- and zirconium-containing composition for vapor deposition of zirconium-containing films | Clément Lansalot-Matras, Julien Lieffrig, Hana Ishii | 2018-01-16 |