Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10106425 | Synthesis methods for halosilanes | Sean Kerrigan, Zhiwen Wan | 2018-10-23 |
| 10106568 | Hafnium-containing film forming compositions for vapor deposition of hafnium-containing films | Christian Dussarrat, Hana Ishii, Clément Lansalot-Matras, Julien Lieffrig | 2018-10-23 |
| 10053775 | Methods of using amino(bromo)silane precursors for ALD/CVD silicon-containing film applications | Glenn Kuchenbeiser, Venkateswara R. Pallem, Nicolas Blasco | 2018-08-21 |
| 10011903 | Manganese-containing film forming compositions, their synthesis, and use in film deposition | Stefan Wiese, Satoko Gatineau | 2018-07-03 |
| 9969756 | Carbosilane substituted amine precursors for deposition of Si-containing films and methods thereof | Claudia Fafard, Venkateswara R. Pallem | 2018-05-15 |
| 9920077 | Amine substituted trisilylamine and tridisilylamine compounds and synthesis methods thereof | Antonio Sanchez, Gennadiy Itov, Manish Khandelwal, Matthew Damien Stephens, Peng Zhang | 2018-03-20 |