Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9969756 | Carbosilane substituted amine precursors for deposition of Si-containing films and methods thereof | Venkateswara R. Pallem, Jean-Marc Girard | 2018-05-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9969756 | Carbosilane substituted amine precursors for deposition of Si-containing films and methods thereof | Venkateswara R. Pallem, Jean-Marc Girard | 2018-05-15 |