Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115600 | Method of etching semiconductor structures with etch gas | Rahul Gupta, Vijay Surla, Curtis Anderson, Nathan Stafford | 2018-10-30 |
| 10053775 | Methods of using amino(bromo)silane precursors for ALD/CVD silicon-containing film applications | Glenn Kuchenbeiser, Nicolas Blasco, Jean-Marc Girard | 2018-08-21 |
| 10006122 | Organodisilane precursors for ALD/CVD silicon-containing film applications | Guillaume Husson, Glenn Kuchenbeiser | 2018-06-26 |
| 9969756 | Carbosilane substituted amine precursors for deposition of Si-containing films and methods thereof | Claudia Fafard, Jean-Marc Girard | 2018-05-15 |
| 9938303 | Organosilane precursors for ALD/CVD silicon-containing film applications | Christian Dussarrat, Glenn Kuchenbeiser | 2018-04-10 |