Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10053775 | Methods of using amino(bromo)silane precursors for ALD/CVD silicon-containing film applications | Glenn Kuchenbeiser, Venkateswara R. Pallem, Jean-Marc Girard | 2018-08-21 |
| 9911590 | Methods of forming dielectric films, new precursors and their use in semiconductor manufacturing | Christian Dussarrat, Audrey Pinchart, Christophe Lachaud | 2018-03-06 |