Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10053775 | Methods of using amino(bromo)silane precursors for ALD/CVD silicon-containing film applications | Venkateswara R. Pallem, Nicolas Blasco, Jean-Marc Girard | 2018-08-21 |
| 10006122 | Organodisilane precursors for ALD/CVD silicon-containing film applications | Guillaume Husson, Venkateswara R. Pallem | 2018-06-26 |
| 9938303 | Organosilane precursors for ALD/CVD silicon-containing film applications | Christian Dussarrat, Venkateswara R. Pallem | 2018-04-10 |