Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115600 | Method of etching semiconductor structures with etch gas | Rahul Gupta, Venkateswara R. Pallem, Vijay Surla, Nathan Stafford | 2018-10-30 |
| 10103031 | Chemistries for TSV/MEMS/power device etching | Peng Shen, Christian Dussarrat, Rahul Gupta, Vincent M. Omarjee, Nathan Stafford | 2018-10-16 |
| 9892932 | Chemistries for TSV/MEMS/power device etching | Peng Shen, Christian Dussarrat, Rahul Gupta, Vincent M. Omarjee, Nathan Stafford | 2018-02-13 |