Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10103031 | Chemistries for TSV/MEMS/power device etching | Peng Shen, Christian Dussarrat, Curtis Anderson, Rahul Gupta, Nathan Stafford | 2018-10-16 |
| 9892932 | Chemistries for TSV/MEMS/power device etching | Peng Shen, Christian Dussarrat, Curtis Anderson, Rahul Gupta, Nathan Stafford | 2018-02-13 |