Issued Patents 2018
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10133181 | Electron source | Yinying Xiao-Li, Xuefeng Liu, John Fielden | 2018-11-20 |
| 10121914 | Back-illuminated sensor with boron layer | Jehn-Huar Chern, Ali R. Ehsani, Gildardo Delgado, David L. Brown, John Fielden | 2018-11-06 |
| 10044166 | CW DUV laser with improved stability | Xiaoxu Lu, John Fielden | 2018-08-07 |
| 10044164 | Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms | Xiaoxu Lu, Justin Dianhuan Liou, J. Joseph Armstrong, Yujun Deng, John Fielden | 2018-08-07 |
| 10032619 | High brightness laser-sustained plasma broadband source | Xiaoxu Lu, Justin Dianhuan Liou, John Fielden | 2018-07-24 |
| 9972959 | Semiconductor inspection and metrology system using laser pulse multiplier | J. Joseph Armstrong, Justin Dianhuan Liou, Vladimir Dribinski, David L. Brown | 2018-05-15 |
| 9966230 | Multi-column electron beam lithography including field emitters on a silicon substrate with boron layer | Yinying Xiao-Li, Xuefeng Liu, John Fielden | 2018-05-08 |
| 9935421 | 193nm laser and inspection system | J. Joseph Armstrong, Yujun Deng, Justin Dianhuan Liou, Vladimir Dribinski, John Fielden | 2018-04-03 |
| 9891177 | TDI sensor in a darkfield system | Jijen Vazhaeparambil, Guoheng Zhao, Daniel Kavaldjiev, Anatoly Romanovsky, Ivan Maleev +5 more | 2018-02-13 |
| 9865447 | High brightness laser-sustained plasma broadband source | Xiaoxu Lu, Justin Dianhuan Liou, John Fielden | 2018-01-09 |
| 9860466 | Sensor with electrically controllable aperture for inspection and metrology systems | John Fielden, David L. Brown, Jingjing Zhang, Keith Lyon, Mark Wang | 2018-01-02 |