| 10133181 |
Electron source |
Yung-Ho Alex Chuang, Yinying Xiao-Li, Xuefeng Liu |
2018-11-20 |
| 10121914 |
Back-illuminated sensor with boron layer |
Jehn-Huar Chern, Ali R. Ehsani, Gildardo Delgado, David L. Brown, Yung-Ho Alex Chuang |
2018-11-06 |
| 10044164 |
Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms |
Yung-Ho Alex Chuang, Xiaoxu Lu, Justin Dianhuan Liou, J. Joseph Armstrong, Yujun Deng |
2018-08-07 |
| 10044166 |
CW DUV laser with improved stability |
Yung-Ho Alex Chuang, Xiaoxu Lu |
2018-08-07 |
| 10032619 |
High brightness laser-sustained plasma broadband source |
Yung-Ho Alex Chuang, Xiaoxu Lu, Justin Dianhuan Liou |
2018-07-24 |
| 9966230 |
Multi-column electron beam lithography including field emitters on a silicon substrate with boron layer |
Yung-Ho Alex Chuang, Yinying Xiao-Li, Xuefeng Liu |
2018-05-08 |
| 9935421 |
193nm laser and inspection system |
Yung-Ho Alex Chuang, J. Joseph Armstrong, Yujun Deng, Justin Dianhuan Liou, Vladimir Dribinski |
2018-04-03 |
| 9865447 |
High brightness laser-sustained plasma broadband source |
Yung-Ho Alex Chuang, Xiaoxu Lu, Justin Dianhuan Liou |
2018-01-09 |
| 9860466 |
Sensor with electrically controllable aperture for inspection and metrology systems |
Yung-Ho Alex Chuang, David L. Brown, Jingjing Zhang, Keith Lyon, Mark Wang |
2018-01-02 |