Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10132760 | Apparatus and methods for finding a best aperture and mode to enhance defect detection | Pavel Kolchin, Lisheng Gao, Grace Hsiu-Ling Chen, Markus Huber, Robert M. Danen | 2018-11-20 |
| 9880107 | Systems and methods for detecting defects on a wafer | Lu Chen, Jason Kirkwood, Mohan Mahadevan, James A. Smith, Lisheng Gao +2 more | 2018-01-30 |