Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10132760 | Apparatus and methods for finding a best aperture and mode to enhance defect detection | Richard Wallingford, Lisheng Gao, Grace Hsiu-Ling Chen, Markus Huber, Robert M. Danen | 2018-11-20 |
| 9989479 | System and method to determine depth for optical wafer inspection | Mikhail Haurylau, Robert M. Danen | 2018-06-05 |