Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10067072 | Methods and apparatus for speckle suppression in laser dark-field systems | Vaibhav Gaind | 2018-09-04 |
| 9880107 | Systems and methods for detecting defects on a wafer | Lu Chen, Mohan Mahadevan, James A. Smith, Lisheng Gao, Junqing Huang +2 more | 2018-01-30 |