MM

Mohan Mahadevan

KL Kla-Tencor: 1 patents #130 of 353Top 40%
Overall (2018): #296,778 of 503,207Top 60%
1
Patents 2018

Issued Patents 2018

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9880107 Systems and methods for detecting defects on a wafer Lu Chen, Jason Kirkwood, James A. Smith, Lisheng Gao, Junqing Huang +2 more 2018-01-30