Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10047435 | Dual selective deposition | Suvi Haukka, Raija H. Matero, Eva Tois, Antti Niskanen, Marko Tuominen +1 more | 2018-08-14 |
| 10043880 | Metal silicide, metal germanide, methods for making the same | Suvi Haukka, Tom E. Blomberg, Eva Tois | 2018-08-07 |
| 10002755 | Process for deposition of titanium oxynitride for use in integrated circuit fabrication | Seiji Okura, Hidemi Suemori | 2018-06-19 |
| 9922817 | Deposition of boron and carbon containing materials | — | 2018-03-20 |
| 9905416 | Si precursors for deposition of SiN at low temperatures | Antti Niskanen, Shang Chen, Atsuki Fukazawa, Hideaki Fukuda, Suvi Haukka | 2018-02-27 |
| 9895715 | Selective deposition of metals, metal oxides, and dielectrics | Suvi Haukka, Raija H. Matero, Eva Tois, Antti Niskanen, Marko Tuominen +2 more | 2018-02-20 |
| 9887082 | Method and apparatus for filling a gap | Werner Knaepen, Bert Jongbloed, Dieter Pierreux, Gido Van Der Star, Toshiya Suzuki | 2018-02-06 |